Titre: | Low temeparture alN thin films growth for layered structure saw and baw devices |
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Auteurs: | Assouar, M.B., Elmazria, O., Hakiki, M.El., Alnot, P. and Tiusan, C. |
Journal: | IEEE International Symposium on Applications of Ferroelectrics |
Annee: | 2005 |
Pages: | 43-46 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |