Titre: | Reliability of AlN/sapphire bilayer structure for high-temperature SAWapplications |
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Auteurs: | Aubert, T., Elmazria, O., Assouar, B., Hamdan, A. and Geneve, D. |
Journal: | Proceedings - IEEE Ultrasonics Symposium |
Annee: | 2010 |
Pages: | 1490-1493 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |