Congrés - Conférences
Conference
| Titre: | Reliability of AlN/sapphire bilayer structure for high-temperature SAWapplications |
|---|---|
| Auteurs: | Aubert, T., Elmazria, O., Assouar, B., Hamdan, A. and Geneve, D. |
| Journal: | Proceedings - IEEE Ultrasonics Symposium |
| Annee: | 2010 |
| Pages: | 1490-1493 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |