Congrés - Conférences
Conference
| Titre: | Microfluidic heater assisted by Rayleigh Surface Acoustic Wave on AlN/128°Y-X LiNbO3 multilayer structure |
|---|---|
| Auteurs: | Roux-Marchand, T., Beyssen, D., Sarry, F., Grandemange, S. and Elmazria, O. |
| Journal: | IEEE International Ultrasonics Symposium, IUS |
| Annee: | 2012 |
| Pages: | 1706-1709 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |