Titre: | Microfluidic heater assisted by Rayleigh Surface Acoustic Wave on AlN/128°Y-X LiNbO3 multilayer structure |
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Auteurs: | Roux-Marchand, T., Beyssen, D., Sarry, F., Grandemange, S. and Elmazria, O. |
Journal: | IEEE International Ultrasonics Symposium, IUS |
Annee: | 2012 |
Pages: | 1706-1709 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |