Titre: | Effect of the nucleation process on freestanding ALN/diamond SAW filter characteristics |
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Auteurs: | Elmazria, O., El Hakiki, M., Mortet, V., Assouar, M.B., Bouvot, L., Nesladek, M., Vanecek, M., Bergonzo, P., D'Olieslaeger, M. and Alnot, P. |
Journal: | Proceedings of the IEEE Ultrasonics Symposium |
Annee: | 2003 |
Volume: | 2 |
Pages: | 1746-1749 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |