Congrés - Conférences
Conference
| Titre: | Effect of the nucleation process on freestanding ALN/diamond SAW filter characteristics |
|---|---|
| Auteurs: | Elmazria, O., El Hakiki, M., Mortet, V., Assouar, M.B., Bouvot, L., Nesladek, M., Vanecek, M., Bergonzo, P., D'Olieslaeger, M. and Alnot, P. |
| Journal: | Proceedings of the IEEE Ultrasonics Symposium |
| Annee: | 2003 |
| Volume: | 2 |
| Pages: | 1746-1749 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |