Congrés - Conférences
Conference
| Titre: | SAW pressure sensor for vacuum control applications |
|---|---|
| Auteurs: | Nicolay, P., Elmazria, O., Sarry, F., Bouvot, L., Kambara, H., Singh, K.J. and Alnot, P. |
| Journal: | 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum |
| Annee: | 2009 |
| Pages: | 106-109 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |