Titre: | Platinum/AlN/Sapphire SAW resonator operating in GHz range for high temperature wireless SAW sensor |
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Auteurs: | Blampain, E., Elmazria, O., Legrani, O., Mc Murtry, S., Montaigne, F., Fu, C., Lee, K.K. and Yang, S.S. |
Journal: | IEEE International Ultrasonics Symposium, IUS |
Annee: | 2013 |
Pages: | 1081-1084 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |