% % This file was created by the TYPO3 extension % bib % --- Timezone: CET % Creation date: 2021-01-27 % Creation time: 08-42-18 % --- Number of references % 1 % @Conference { Assouar200543, title = {Low temeparture alN thin films growth for layered structure saw and baw devices}, journal = {IEEE International Symposium on Applications of Ferroelectrics}, year = {2005}, pages = {43-46}, note = {Centre de Comp{\'e}tences : MiNaLor micro et nanotechnologies}, web_url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-28144462895\&partnerID=40\&md5=9762afdb8aa5391ef7b1bb693907c156}, author = {Assouar, M.B. and Elmazria, O. and Hakiki, M.El. and Alnot, P. and Tiusan, C.} }