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@Conference { Assouar200543,
   title = {Low temeparture alN thin films growth for layered structure saw and baw devices},
   journal = {IEEE International Symposium on Applications of Ferroelectrics},
   year = {2005},
   pages = {43-46},
   note = {Centre de Comp{\'e}tences : MiNaLor micro et nanotechnologies},
   web_url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-28144462895\&partnerID=40\&md5=9762afdb8aa5391ef7b1bb693907c156},
   author = {Assouar, M.B. and Elmazria, O. and Hakiki, M.El. and Alnot, P. and Tiusan, C.}
}