This file was created by the TYPO3 extension bib --- Timezone: CET Creation date: 2021-03-06 Creation time: 05-23-16 --- Number of references 1 conference Mercier2011902 Saw-Pirani vacuum sensor with a new functioning mode and a fast response time 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 2011 902-905 Centre de Compétences : MiNaLor micro et nanotechnologies http://www.scopus.com/inward/record.url?eid=2-s2.0-80052116957&partnerID=40&md5=5df09c5dff65a9c31eff9c50191c0e24 D.Mercier G.Bordel P.Brunet-Manquat S.Verrun O.Elmazria F.Sarry B.Belgacem J.Bounouar