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bib
--- Timezone: CET
Creation date: 2021-03-05
Creation time: 18-17-49
--- Number of references
1
conference
Link2005202
C-axis inclined ZnO films deposited by reactive sputtering using an additional blind for shear BAW devices
Proceedings - IEEE Ultrasonics Symposium
2005
1
202-205
Centre de Compétences : MiNaLor micro et nanotechnologies
http://www.scopus.com/inward/record.url?eid=2-s2.0-33847119341&partnerID=40&md5=94884b771b59338d4bdb10b33fbd0108
M.Link
M.Schreiter
J.Weber
D.Pitzer
R.Primig
M.B.Assouar
O.Elmazria