% % This file was created by the TYPO3 extension % bib % --- Timezone: CET % Creation date: 2021-03-04 % Creation time: 23-09-40 % --- Number of references % 1 % @Conference { Mercier2011902, title = {Saw-Pirani vacuum sensor with a new functioning mode and a fast response time}, journal = {2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11}, year = {2011}, pages = {902-905}, note = {Centre de Comp{\'e}tences : MiNaLor micro et nanotechnologies}, web_url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-80052116957\&partnerID=40\&md5=5df09c5dff65a9c31eff9c50191c0e24}, author = {Mercier, D. and Bordel, G. and Brunet-Manquat, P. and Verrun, S. and Elmazria, O. and Sarry, F. and Belgacem, B. and Bounouar, J.} }