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@Conference { Mercier2011902,
   title = {Saw-Pirani vacuum sensor with a new functioning mode and a fast response time},
   journal = {2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11},
   year = {2011},
   pages = {902-905},
   note = {Centre de Comp{\'e}tences : MiNaLor micro et nanotechnologies},
   web_url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-80052116957\&partnerID=40\&md5=5df09c5dff65a9c31eff9c50191c0e24},
   author = {Mercier, D. and Bordel, G. and Brunet-Manquat, P. and Verrun, S. and Elmazria, O. and Sarry, F. and Belgacem, B. and Bounouar, J.}
}