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@Conference { Assouar2002249,
   title = {Piezoelectric aluminum nitride films deposited by triode sputtering for surface acoustic wave devices},
   journal = {Ferroelectrics},
   year = {2002},
   volume = {273},
   pages = {249-254},
   note = {Centre de Comp{\'e}tences : MiNaLor micro et nanotechnologies},
   web_url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-33746280817\&partnerID=40\&md5=abfa0abaa8488d083e3ddc04057c91cb},
   author = {Assouar, M.B. and Elmazria, O. and Mortet, V. and Jouan, P.-Y. and Djouadi, M.A. and Alnot, P.}
}