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@Conference { Link2005202,
   title = {C-axis inclined ZnO films deposited by reactive sputtering using an additional blind for shear BAW devices},
   journal = {Proceedings - IEEE Ultrasonics Symposium},
   year = {2005},
   volume = {1},
   pages = {202-205},
   note = {Centre de Comp{\'e}tences : MiNaLor micro et nanotechnologies},
   web_url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-33847119341\&partnerID=40\&md5=94884b771b59338d4bdb10b33fbd0108},
   author = {Link, M. and Schreiter, M. and Weber, J. and Pitzer, D. and Primig, R. and Assouar, M.B. and Elmazria, O.}
}