SAW sensors and their applications for multi-parameters sensing: Gas, Icing, Magnetic field, and Temperature

Surface acoustic waves (SAWs) are mechanical acoustic waves that propagate along the surface of a piezoelectric medium, generated by micro-nano interdigitated electrodes deposited on the surface of the piezoelectric medium using the piezoelectric effect. Due to the high frequency, excellent reciprocity and symmetry of the interdigitated electrodes, as well as the simplicity and flexibility of the design, and the use of semiconductor planar lithographic technique, SAW devices, as key components in signal processing, have become crucial analog components in fields such as mobile communications and radar, with an annual market application scale exceeding tens of billions. Additionally, because acoustic energy is concentrated on the surface of the medium, it is extremely sensitive to surface loads, forming another important development direction of SAW technology, namely intelligent sensing. Compared to other sensing technologies, SAW sensors have technical advantages such as high sensitivity, fast response, wide measurement range, and high reliability. In particular, they can provide a novel sensing method that is passive (senses without power supply), and transmits wirelessly, which has attracted widespread attention and great interest. After nearly 30 years of development, a large number of SAW sensors have been successfully applied in special fields such as national defense, power, intelligent manufacturing, aerospace, and more, for in-situ detection of multiple parameters such as temperature, mechanics, and gas, demonstrating significant application value. This presentation will focus on reporting the research and sensor applications of SAW multi- parameter sensing effects, mechanisms, devices, and system integration, including gas, icing, magnetic field, and temperature sensing, based on the research results of the laboratory team.

Séminaire organisé dans le cadre du programme interdisciplinaire MAT-PULSE (Materials and Physics @ Ultimate Scale: Nanotech for a sustainable digital world)