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Article

Title: Characteristics of argon and helium plasmas created by microwave discharge at atmospheric pressure
Author(s): T. Belmonte, R. P. Cardoso, C. Noel, G. Henrion and F. Kosior
Journal: Informacije Midem-Journal of Microelectronics Electronic Components and Materials
Year: 2007
Volume: 37
Issue: 3
Pages: 117-122
Note: Département CP2S : ESPRITS

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