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Title: Description of a hybrid PECVD-PVD-process: Application to Zn-Si-O and Ti-Si-O composites thin films
Author(s): A. Daniel, T. Duguet and T. Belmonte
Journal: Applied Surface Science
Year: 2007
Volume: 253
Issue: 24
Pages: 9323-9329
Note: Département CP2S : ESPRITS

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