Title: | Effect of microwave remote plasma and radiofrequency plasma on the photoluminescence properties of (0001) epitaxial ZnO films |
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Author(s): | S. Margueron, S. Ropers, F. Genty, A. Bartasyte and T. Belmonte |
Journal: | Materials Chemistry and Physics |
Year: | 2014 |
Volume: | 147 |
Pages: | 623-628 |
DOI: | 10.1016/j.matchemphys.2014.05.040 |
Note: | Département CP2S : ESPRITS |