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Article
| Titre: | Influence of substrate temperature on the structural, dielectric and optical properties of RF magnetron sputtered Ta2O5 films |
|---|---|
| Auteur(s): | S. Uthanna, S.V. Jagadeesh Chandra, G. Mohan Rao et J.F. Pierson |
| Journal: | IOP Conference Series: Materials Science and Engineering |
| Année: | 2010 |
| Volume: | 8 |
| Pages: | 012025 |
| Projet: | Département CP2S : EFCM |