Titre: | Effect of nitrogen partial pressure on the structure, physical and mechanical properties of CrB2 and Cr-B-N films |
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Auteurs: | Kiryukhantsev-Korneev, Ph., Pierson, J.F., Petrzhik, M.I., Alnot, M., Levashov, E.A. and Shtansky, D.V. |
Journal: | Thin Solid Films |
Annee: | 2009 |
Volume: | 517 |
Pages: | 2675-2680 |
Equipe: | Département CP2S : Elaboration et Fonctionnalité de Couches Minces |