Publications: Articles
Article
| Titre: | Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications |
|---|---|
| Auteurs: | Aubert, T., Assouar, M.B., Legrani, O., Elmazria, O., Tiusan, C. and Robert, S. |
| Journal: | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Annee: | 2011 |
| Volume: | 29 |
| olabel_issue: | 2 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |