Titre: | Surface acoustic wave devices based on nanocrystalline diamond and aluminium nitride |
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Auteurs: | BEnEdic, F., Assouar, M.B., Mohasseb, F., Elmazria, O., Alnot, P. and Gicquel, A. |
Journal: | Diamond and Related Materials |
Annee: | 2004 |
Volume: | 13 |
olabel_issue: | 2 |
Pages: | 347-353 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |