Titre: | ZnO/quartz structure potentiality for surface acoustic wave pressure sensor |
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Auteurs: | Talbi, A., Sarry, F., Elhakiki, M., Le Brizoual, L., Elmazria, O., Nicolay, P. and Alnot, P. |
Journal: | Sensors and Actuators, A: Physical |
Annee: | 2006 |
Volume: | 128 |
olabel_issue: | 1 |
Pages: | 78-83 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |