Publications: Articles
Article
| Titre: | Production of N and O atoms in flowing Ar-N2-O2 microwave discharges with separated N2 and O2 pulsed gases |
|---|---|
| Auteurs: | Bernardelli, E., Ricard, A. and Belmonte, T. |
| Journal: | Plasma Sources Science and Technology |
| Annee: | 2011 |
| Volume: | 20 |
| Pages: | 025012 |
| Equipe: | Département CP2S : Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS |