This file was created by the TYPO3 extension bib --- Timezone: CET Creation date: 2021-03-07 Creation time: 22-17-40 --- Number of references 4 article Mortet200388 Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications Surface and Coatings Technology 2003 176 1 88-92 Centre de Compétences : MiNaLor micro et nanotechnologies http://www.scopus.com/inward/record.url?eid=2-s2.0-0242498787&partnerID=40&md5=cd32363719e9e2e7551164c9e3c48997 V.Mortet A.Vasin P.-Y.Jouan O.Elmazria M.-A.Djouadi article Elmazria2003416 Electrical properties of piezoelectric aluminium nitride films deposited by reactive dc magnetron sputtering Physica Status Solidi (A) Applied Research 2003 196 2 416-421 Centre de Compétences : MiNaLor micro et nanotechnologies http://www.scopus.com/inward/record.url?eid=2-s2.0-0038361108&partnerID=40&md5=365508527dc2d97a741fa00a311db9db O.Elmazria M.B.Assouar P.Renard P.Alnot article Elmazria2003710 High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 2003 50 6 710-715 Centre de Compétences : MiNaLor micro et nanotechnologies http://www.scopus.com/inward/record.url?eid=2-s2.0-0038720487&partnerID=40&md5=9985e58cc2a64d40ae0a60f79824bedc O.Elmazria V.Mortet M.El Hakiki M.Nesládek P.Alnot article Mortet2003723 Study of aluminium nitride/freestanding diamond surface acoustic waves filters Diamond and Related Materials 2003 12 3-7 723-727 Centre de Compétences : MiNaLor micro et nanotechnologies http://www.scopus.com/inward/record.url?eid=2-s2.0-0038184125&partnerID=40&md5=6d2ae6b7684ae2924f00f343a14021ea V.Mortet O.Elmazria M.Nesládek J.D'Haen G.Vanhoyland M.Elhakiki A.Tajani E.Bustarret E.Gheeraert M.D'Olieslaeger P.Alnot