Titre: | Impact of the particles impingement on the electronic conductivity of Al doped ZnO films grown by reactive magnetron sputtering |
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Auteurs: | Jullien, M, HORWAT, D, Endrino, J L, Galindo, R Escobar, Bauer, Ph and Pierson, J F |
Journal: | IOP Conference Series: Materials Science and Engineering |
Annee: | 2010 |
Volume: | 12 |
Pages: | 012006 |
Equipe: | Département CP2S : Elaboration et Fonctionnalité de Couches Minces |