Publications: Articles
Article
| Titre: | Synthesis of carbon nitride thin films by N2/CH4 microwave plasma assisted by chemical vapor deposition: characterisation of discharge and the obtained films |
|---|---|
| Auteurs: | Kouakou, P., Brien, V., Assouar, M. B., Hody, V., Belmahi, M., Migeon, H. N. and Bougdira, J. |
| Journal: | Plasma Processes and Polymers |
| Annee: | 2007 |
| Volume: | 4 |
| Pages: | 210-214 |
| Equipe: | Département CP2S : Elaboration et Fonctionnalité de Couches Minces |