Congrés - Conférences
Conference
| Titre: | High velocity SAW using aluminum nitride film on unpolished nucleation side of freestanding CVD diamond |
|---|---|
| Auteurs: | Elmazria, O., Mortet, V., El Hakiki, M., Assouar, M.B., Nesladek, M. and Alnot, P. |
| Journal: | Proceedings of the IEEE Ultrasonics Symposium |
| Annee: | 2002 |
| Volume: | 1 |
| Pages: | 139-142 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |