Congrés - Conférences
Conference
| Titre: | Study of tantalum and iridium as adhesion layers for Pt/LGS high temperature SAW devices |
|---|---|
| Auteurs: | Aubert, T., Elmazria, O., Assouar, B., Bouvot, L., Bournebe, Z., Hehn, M., Weber, S., Oudich, M. and Alnot, P. |
| Journal: | Proceedings - IEEE Ultrasonics Symposium |
| Annee: | 2009 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |