Titre: | Study of tantalum and iridium as adhesion layers for Pt/LGS high temperature SAW devices |
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Auteurs: | Aubert, T., Elmazria, O., Assouar, B., Bouvot, L., Bournebe, Z., Hehn, M., Weber, S., Oudich, M. and Alnot, P. |
Journal: | Proceedings - IEEE Ultrasonics Symposium |
Annee: | 2009 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |