Congrés - Conférences
Conference
| Titre: | Saw-Pirani vacuum sensor with a new functioning mode and a fast response time |
|---|---|
| Auteurs: | Mercier, D., Bordel, G., Brunet-Manquat, P., Verrun, S., Elmazria, O., Sarry, F., Belgacem, B. and Bounouar, J. |
| Journal: | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
| Annee: | 2011 |
| Pages: | 902-905 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |