Congrés - Conférences
Conference
| Titre: | Theoretical and experimental study of the differential thermal expansion effect on the TCD of layered SAW temperature sensors. Application to aluminum nitride based layered structures |
|---|---|
| Auteurs: | Nicolay, P., Elmazria, O., Assouar, B., Sarry, F. and Lebrizoual, L. |
| Journal: | Proceedings - IEEE Ultrasonics Symposium |
| Annee: | 2007 |
| Pages: | 272-275 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |