Congrés - Conférences
Conference
| Titre: | Very high surface acoustic wave velocity on the layered structure formed of aluminium nitride on nanocrystalline diamond on silicon |
|---|---|
| Auteurs: | Elmazria, O., B, F., Assouar, M.B., Mon, D., Le Brizoual, L., Gicquel, A. and Alnot, P. |
| Journal: | Proceedings - IEEE Ultrasonics Symposium |
| Annee: | 2007 |
| Pages: | 276-279 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |