Titre: | Very high surface acoustic wave velocity on the layered structure formed of aluminium nitride on nanocrystalline diamond on silicon |
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Auteurs: | Elmazria, O., B, F., Assouar, M.B., Mon, D., Le Brizoual, L., Gicquel, A. and Alnot, P. |
Journal: | Proceedings - IEEE Ultrasonics Symposium |
Annee: | 2007 |
Pages: | 276-279 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |