This file was created by the TYPO3 extension
bib
--- Timezone: CET
Creation date: 2021-01-27
Creation time: 03-02-03
--- Number of references
1
conference
Assouar2002249
Piezoelectric aluminum nitride films deposited by triode sputtering for surface acoustic wave devices
Ferroelectrics
2002
273
249-254
Centre de Compétences : MiNaLor micro et nanotechnologies
http://www.scopus.com/inward/record.url?eid=2-s2.0-33746280817&partnerID=40&md5=abfa0abaa8488d083e3ddc04057c91cb
M.B.Assouar
O.Elmazria
V.Mortet
P.-Y.Jouan
M.A.Djouadi
P.Alnot