This file was created by the TYPO3 extension bib --- Timezone: CET Creation date: 2021-01-27 Creation time: 03-02-03 --- Number of references 1 conference Assouar2002249 Piezoelectric aluminum nitride films deposited by triode sputtering for surface acoustic wave devices Ferroelectrics 2002 273 249-254 Centre de Compétences : MiNaLor micro et nanotechnologies http://www.scopus.com/inward/record.url?eid=2-s2.0-33746280817&partnerID=40&md5=abfa0abaa8488d083e3ddc04057c91cb M.B.Assouar O.Elmazria V.Mortet P.-Y.Jouan M.A.Djouadi P.Alnot