This file was created by the TYPO3 extension bib --- Timezone: CET Creation date: 2021-01-16 Creation time: 04-31-19 --- Number of references 1 conference Nicolay2009106 SAW pressure sensor for vacuum control applications 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum 2009 106-109 Centre de Compétences : MiNaLor micro et nanotechnologies http://www.scopus.com/inward/record.url?eid=2-s2.0-70449487119&partnerID=40&md5=2b01b8a8e83f8e6d656074d23dc2ac84 P.Nicolay O.Elmazria F.Sarry L.Bouvot H.Kambara K.J.Singh P.Alnot