Micro and Nanotechnologies Competence Center (CC MiNaLor)

• Suss MicroTec MJB4 Mask Aligner for Optical Lithography
• SmartPrint maskless optical lithography equipment
• Raith 150-2 electron lithography apparatus
• Tencor P6 Mechanical Profilometer
• Micro Diamond Scriber MR200
• IBE 4Wave Ion Beam Ion Etching Equipment, assisted by a Hiden SIMS Secondary Ion Mass Spectrometer
• Tucano O2 Plasma Equipment
• Kenosistec KS400HR sputter deposition machine
• Evaporation deposition frame with PLASSYS MEB400 S electron gun technology
• 3 Leica optical microscopes
• 5 extractor hoods with ultrasonic and thermostatically controlled bath
• 4 resin treatment stations with spinners and heating plates
• 2 micro-welding equipment
•  Horizontal, vertical wire cutting and disc cutting

Publications:

• A tunable magnetic metamaterial based on the dipolar four-state Potts model, Nature Materials 17, 1076 (2018), D. Louis et al.
   
• Thermal Contribution to the Spin-Orbit Torque in Metallic-Ferrimagnetic Systems, Physical Review Applied 9, 064032 (2018), T. H. Pham et al.
   
• Intrinsic versus shape anisotropy in micro-structured magnetostrictive thin films for magnetic surface acoustic wave sensors, Smart Materials and Structures 28, 12LT01 (2019), H. Mishra et al.
   
• SAW RFID devices using connected IDTs as an alternative to conventional reflectors for harsh environments, in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (2019), C. Floer et al.
   
• Interfacial influence on electrical injection and transport characterization of CoFeB|MgO|GaAs-InGaAs quantum wells hetero-structure, Applied Surface Science 473, 230 (2019), Y. Tian et al.

Achievements:

•     Electrical contact making on nanostructures
•     Hall effect measurements
•     Coplanar waveguide
•     Interdigital electrodes for generating and detecting acoustic waves

CC MiNaLor offers you the following services:

• Micro and nanofabrication processes
• Reduction of lateral sizes on a nanoscale
• Creation of nanostructures (top-down)
• "Lab on chip"
• Microfluidic devices
• Spin electronics: Tunnel junctions, Wall devices
• Micro and nano-antennae
• Piezoelectric membranes
• Characterization of unique thermoelectric nanowires
• Contacts on semi-conductor structures
• Precise cutting of bare or already structured flat crystals (deposit or micro components)
• Integration of micro-nano components on PCB board

Permanent researcher

• Thierry AUBERT

Support staff

• Demba BA
• Laurent BADIE
• Sophie BRAVETTI-PLONEIS
• Sébastien GEISKOPF