Micro and Nanotechnologies Competence Center (CC MiNaLor)
Placement of a sample in an optical lithography machine in a clean room
Thin film deposition room for the micro-nano manufacturing process
Component with a set of micro-devices, some of which are electrically connected to a PCB
Activities
The MiNaLor Competence Center (CC MiNaLor) brings together the equipment and skills necessary for the implementation of micro and nanofabrication processes. It also provides micro-nano-technology support for the scientific projects of the IJL and its academic and industrial partners.
These processes, including optical and electronic lithography, make it possible to functionalize materials or reduce their lateral sizes to a nanometric scale in order to modify their properties.
These uses are, on the one hand, in fundamental physics, whether for the physical measurement of materials or the study of the specific properties of nanostructures, and, on the other hand, in engineering for the development of integrated micro-sensors.
Equipment
- Suss MicroTec MJB4 Mask Aligner for Optical Lithography
- SmartPrint maskless optical lithography equipment
- Raith 150-2 electron lithography apparatus
- Tencor P6 Mechanical Profilometer
- Micro Diamond Scriber MR200
- IBE 4Wave Ion Beam Ion Etching Equipment, assisted by a Hiden SIMS Secondary Ion Mass Spectrometer
- Tucano O2 Plasma Equipment
- Kenosistec KS400HR sputter deposition machine
- Evaporation deposition frame with PLASSYS MEB400 S electron gun technology
- 3 Leica optical microscopes
- 5 extractor hoods with ultrasonic and thermostatically controlled bath
- 4 resin treatment stations with spinners and heating plates
- 2 micro-welding equipment
- Horizontal, vertical wire cutting and disc cutting
Examples of achievements
Publications:
- A tunable magnetic metamaterial based on the dipolar four-state Potts model, Nature Materials 17, 1076 (2018), D. Louis et al.
- Thermal Contribution to the Spin-Orbit Torque in Metallic-Ferrimagnetic Systems, Physical Review Applied 9, 064032 (2018), T. H. Pham et al.
- Intrinsic versus shape anisotropy in micro-structured magnetostrictive thin films for magnetic surface acoustic wave sensors, Smart Materials and Structures 28, 12LT01 (2019), H. Mishra et al.
- SAW RFID devices using connected IDTs as an alternative to conventional reflectors for harsh environments, in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (2019), C. Floer et al.
- Interfacial influence on electrical injection and transport characterization of CoFeB|MgO|GaAs-InGaAs quantum wells hetero-structure, Applied Surface Science 473, 230 (2019), Y. Tian et al.
Achievements:
- Electrical contact making on nanostructures
- Hall effect measurements
- Coplanar waveguide
- Interdigital electrodes for generating and detecting acoustic waves
Our services
CC MiNaLor offers you the following services:
- Micro and nanofabrication processes
- Reduction of lateral sizes on a nanoscale
- Creation of nanostructures (top-down)
- "Lab on chip"
- Microfluidic devices
- Spin electronics: Tunnel junctions, Wall devices
- Micro and nano-antennae
- Piezoelectric membranes
- Characterization of unique thermoelectric nanowires
- Contacts on semi-conductor structures
- Precise cutting of bare or already structured flat crystals (deposit or micro components)
- Integration of micro-nano components on PCB board
Members
Permanent researcher
Support staff
- Demba BA
- Laurent BADIE
- Sophie BRAVETTI-PLONEIS
- Sébastien GEISKOPF
Contact
Head of the competence center
Thierry AUBERT
thierry.aubert@univ-lorraine.fr
+ 33 (0)3 72 74 25 27
Nancy-Artem
Institut Jean Lamour
Campus Artem
2 allée André Guinier - BP 50840
54011 NANCY Cedex
